Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids
Huang, Linya, Li, Wei, Luo, Guoxi, Lu, Dejiang, Zhao, Libo, Yang, Ping, Wang, Xiaozhang, Wang, Jiuhong, Lin, Qijing, Jiang, Zhuangde
Published in Microsystems & nanoengineering (02.04.2022)
Published in Microsystems & nanoengineering (02.04.2022)
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An integrated micromachined flexible ultrasonic-inductive sensor for pipe contaminant multiparameter detection
Yuan, Zheng, Wu, Xiaoyu, Li, Zhikang, Yuan, Jiawei, Zhao, Yihe, Li, Zixuan, Qin, Shaohui, Ma, Qi, Shi, Xuan, Zhao, Zilong, Li, Jiazhu, Zhang, Shiwang, Jing, Weixuan, Wang, Xiaozhang, Zhao, Libo
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Published in Microsystems & nanoengineering (2024)
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A MEMS Sensors Based on A Laterally Movable Gate Field-Effect Transistor(LMGFET)with A Novel Decoupling Sandwich Structure
Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu, Ping Yang, Libo Zhao, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun
Published in 工程（英文） (01.02.2023)
Published in 工程（英文） (01.02.2023)
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Journal Article
A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure
Gao, Wendi, Qiao, Zhixia, Han, Xiangguang, Wang, Xiaozhang, Shakoor, Adnan, Liu, Cunlang, Lu, Dejiang, Yang, Ping, Zhao, Libo, Wang, Yonglu, Wang, Jiuhong, Jiang, Zhuangde, Sun, Dong
Published in Engineering (Beijing, China) (01.02.2023)
Published in Engineering (Beijing, China) (01.02.2023)
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Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams
Yu, Mingzhi, Zhao, Libo, Chen, Shanshan, Han, Xiangguang, Jia, Chen, Xia, Yong, Wang, Xiaozhang, Wang, Yonglu, Yang, Ping, Lu, Dejiang, Jiang, Zhuangde
Published in Microsystems & nanoengineering (11.01.2023)
Published in Microsystems & nanoengineering (11.01.2023)
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Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers
Yuan, Jiawei, Li, Zhikang, Ma, Qi, Li, Jie, Li, Zixuan, Zhao, Yihe, Qin, Shaohui, Shi, Xuan, Zhao, Libo, Yang, Ping, Luo, Guoxi, Wang, Xiaozhang, Teh, Kwok Siong, Jiang, Zhuangde
Published in Microsystems & nanoengineering (23.02.2023)
Published in Microsystems & nanoengineering (23.02.2023)
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