Modeling of Photoinduced Deformation in Silicon Microcantilever
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Published in Sensors (Basel, Switzerland) (03.09.2007)
Published in Sensors (Basel, Switzerland) (03.09.2007)
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Method for manufacturing silicon chip of ultramicro tension pressure sensor
SHEN SHAOQUN, WANG BING, WANG WENXIANG, WANG QUAN, BAO MINHANG, XUE WEI
Year of Publication 03.12.2008
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Year of Publication 03.12.2008
Patent
Method for manufacturing silicon chip of ultramicro tension pressure sensor
SHEN SHAOQUN, WANG BING, WANG WENXIANG, WANG QUAN, BAO MINHANG, XUE WEI
Year of Publication 23.01.2008
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Year of Publication 23.01.2008
Patent