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Published in Nanoscale horizons (31.01.2022)
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High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching
Jefimovs, Konstantins, Romano, Lucia, Vila-Comamala, Joan, Kagias, Matias, Wang, Zhentian, Wang, Li, Dais, Christian, Solak, Harun, Stampanoni, Marco
Published in arXiv.org (31.10.2018)
Published in arXiv.org (31.10.2018)
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