SUBSTRATE PROCESS APPARATUS FOR MONITORING DIMENSIONS OF STRUCTURES LOCATED IN DIFFERENT POSITIONS IN PROCESSING SUBSTRATE TO SEPARATELY MONITOR AND CONTROL PROCESS FOR FORMING STRUCTURES IN DIFFERENT POSITIONS OF SUBSTRATE
BARNES MICHAEL, SUI ZHIFENG, JAIN MOHIT, PU BRYANY, ARMACOST MICHAELD, HOLLAND JOHN, MAYDAN DAN, SHAN HONGQING, HANSON NEILE, XIAOBINGMA. DIANA, SINHA ASHOKK
Year of Publication 04.03.2005
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Year of Publication 04.03.2005
Patent
Substrate processing apparatus and method
BARNES MICHAEL, SUI ZHIFENG, JAIN MOHIT, PU BRYANY, ARMACOST MICHAELD, HOLLAND JOHN, MAYDAN DAN, SHAN HONGQING, HANSON NEILE, XIAOBINGMA DIANA, SINHA ASHOKK
Year of Publication 19.10.2011
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Year of Publication 19.10.2011
Patent