Etch rates for micromachining processing-Part II
Williams, K.R., Gupta, K., Wasilik, M.
Published in Journal of Microelectromechanical Systems (01.12.2003)
Published in Journal of Microelectromechanical Systems (01.12.2003)
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Journal Article
Vacuum Steered-Electron Electric-Field Sensor
Williams, Kirt R., De Bruyker, Dirk P. H., Limb, Scott J., Amendt, Eric M., Overland, Doug A.
Published in Journal of microelectromechanical systems (01.02.2014)
Published in Journal of microelectromechanical systems (01.02.2014)
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Journal Article
PROPORTIONALE, MIKROMECHANISCHE VORRICHTUNG
WILLIAMS, KIRT R, FULLER, EDWARD NELSON, MALUF, NADIM I, VAN DRIEENHUIZEN, BERT P, BARRON, RICHARD J
Year of Publication 30.07.2009
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Year of Publication 30.07.2009
Patent
Proportional micromechanical valve
Maluf, Nadim I, Williams, Kirt R, Van Drieenhuizen, Bert P, Fuller, Edward Nelson, Barron, Richard J
Year of Publication 06.05.2008
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Year of Publication 06.05.2008
Patent
Proportional micromechanical valve
MALUF NADIM I, WILLIAMS KIRT R, BARRON RICHARD J, VAN DRIEENHUIZEN BERT P, FULLER EDWARD NELSON
Year of Publication 06.05.2008
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Year of Publication 06.05.2008
Patent
PROPORTIONAL MICROMECHANICAL DEVICE
MALUF, NADIM, I, WILLIAMS, KIRT, R, BARRON, RICHARD, J, VAN DRIEENHUIZEN, BERT, P, FULLER, EDWARD, NELSON
Year of Publication 23.04.2008
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Year of Publication 23.04.2008
Patent
WÄRMEBETÄTIGTE MIKROVENTILVORRICHTUNG
FULLER, E., NELSON, HUNNICUTT, HARRY, A, BARRON, RICHARD, WILLIAMS, KIRT, R
Year of Publication 15.12.2006
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Year of Publication 15.12.2006
Patent
THERMALLY ACTUATED MICROVALVE ASSEMBLY
FULLER, E., NELSON, HUNNICUTT, HARRY, A, BARRON, RICHARD, WILLIAMS, KIRT, R
Year of Publication 15.11.2006
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Year of Publication 15.11.2006
Patent
Proportional micromechanical valve
MALUF NADIM I, WILLIAMS KIRT R, BARRON RICHARD J, VAN DRIEENHUIZEN BERT P, FULLER EDWARD NELSON
Year of Publication 14.03.2006
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Year of Publication 14.03.2006
Patent
Proportional micromechanical valve
Maluf, Nadim I, Williams, Kirt R, Van Drieënhuizen, Bert P, Fuller, Edward Nelson, Barron, Richard J
Year of Publication 14.03.2006
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Year of Publication 14.03.2006
Patent