TiN/TiSi2 Formation Using TiNx Layer and Its Feasibilities in ULSI
Byun Jeong Soo, Kim Chang Reol, Rha Kwan Goo, Kim Jae Jeong, Kim Woo Shik
Published in Japanese Journal of Applied Physics (1995)
Published in Japanese Journal of Applied Physics (1995)
Get full text
Journal Article
Conference Proceeding
SURFACE PLASMON RESONANCE SENSOR SYSTEM
KIM, YONG KYU, PARK, HYUN KYU, CHUNG, BONG HYUN, SHIN, YONG BEOM, JEON, BU IL, RHA, KWAN GOO
Year of Publication 15.03.2012
Get full text
Year of Publication 15.03.2012
Patent
Annealing effects of polycrystalline silicon gate on electrical properties of thin gate oxide
Cho, Won-Ju, Kim, Eung-Soo, Kang, Jun-Jin, Rha, Kwan-Goo, Kim, Hong-Seok
Published in Solid-state electronics (01.04.1998)
Published in Solid-state electronics (01.04.1998)
Get full text
Journal Article
Formation of a large grain sized TiN layer using TiN x , the epitaxial continuity at the Al/TiN interface, and its electromigration endurance in multilayered interconnection
Byun, Jeong Soo, Rha, Kwan Goo, Kim, Jae Jeong, Kim, Woo Shik, Kim, Hak Nam, Cho, Hae Seok, Kim, Hyeong Joon
Published in Journal of applied physics (01.08.1995)
Published in Journal of applied physics (01.08.1995)
Get more information
Journal Article
Apparatus for supporting substrate and plasma etching apparatus having the same
RHA KWAN GOO, KIM DONG WAN, LEE HYANG JOO, JANG CHUL HEE, LEE JUNG HEE, LEE WON HAENG
Year of Publication 17.03.2015
Get full text
Year of Publication 17.03.2015
Patent