Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A
Workshop on Tungsten and Other Refractory Metals for VLSI Applications, Eliot K. Broadbent, Blewer, R. S, Materials Research Society
Year of Publication 1987
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Year of Publication 1987
Book
Tungsten and other refractory metals for VLSI applications : proceedings of the 1985 workshop held October 7-9, 1985, Albuquerque, New Mexico, U.S.A. and the 1984 workshop held November 12-13, 1984, Albuquerque, New Mexico, U.S.A
Workshop on Tungsten and Other Refractory Metals for VLSI Applications, Blewer, R. S
Year of Publication 1986
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Year of Publication 1986
Book
Application of self-aligned CoSi2 interconnection in submicrometer CMOS transistors
BROADBENT, E. K, IRANI, R. F, MORGAN, A. E, MAILLOT, P
Published in IEEE transactions on electron devices (01.11.1989)
Published in IEEE transactions on electron devices (01.11.1989)
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Journal Article
MOCVD-TiN Barrier Layers for ULSI Applications
Raaijmakers, Ivo J., Vrtis, Raymond N., Yang, Jack, Ramaswami, Seshadri, Lagendijk, Andre, Roberts, David A., Broadbent, Eliot K.
Published in MRS proceedings (1992)
Published in MRS proceedings (1992)
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Journal Article