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Year of Publication 03.09.1997
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METHOD OF MAKING A CHEMICAL-MECHANICAL POLISHING SLURRY AND THE POLISHING SLURRY
SCHONAUER, DIANA, M, AVANZINO, STEVEN, C, WOO, CHRISTY, MEIU, BURKE, PETER, AUSTIN
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Process for improving sheet resistance of a fet device gate
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Published in Daily news (New York, N.Y. : 1920) (18.08.2006)
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Published in Daily news (New York, N.Y. : 1920) (18.08.2006)
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