by Berglund, C.N., Leachman, R.C.
Published in IEEE transactions on semiconductor manufacturing (01.02.2010)

by Berglund, C. Neil
Published in Proceedings of SPIE (01.06.2003)

by Pei, Zeting, Berglund, C. Neil
Published in Japanese Journal of Applied Physics (15.01.2002)

by Berglund, C.N.
Published in IEEE transactions on semiconductor manufacturing (01.08.1996)

by Xu Ouyang, Berglund, C.N., Fabian, R.
Published in IEEE transactions on semiconductor manufacturing (01.02.2002)

by Bai, Min, Pickard, Daniel S, Tanasa, Corina, McCord, Mark A, Berglund, C. Neil, Pease, Roger Fabian W
Published in Proceedings of SPIE (18.12.1998)

by Berglund, C. N
Published in Proceedings of SPIE (24.09.2010)

by ABBOUD, FRANK E, BERGLUND, C. NEIL, MURAY, ANDREW J
Year of Publication 01.02.1999

by NEIL BERGLUND, C, LEACHMAN, Robert C
Published in IEEE transactions on semiconductor manufacturing (2010)

by Weber, C.M., Berglund, C.N., Gabella, P.
Published in IEEE transactions on semiconductor manufacturing (01.11.2006)

by Berglund, C.N., Weber, C.M., Gabella, P.
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)

by SWENSON, Edward J, BERGLUND, C. Neil
Published in Proceedings of the IEEE (01.10.2002)

by Berglund, C. Neil, Weber, Charles M, Gabella, Patricia
Published in Proceedings of SPIE (06.10.2006)

by Berglund, C.N., Weber, C.M., Castilla, C.
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)

by Ouyang, Xu, Berglund, C. Neil, Pease, Roger Fabian W
Published in Proceedings of SPIE (22.08.2001)

by Berglund, C. Neil
Year of Publication 01.01.1994

by Xu Ouyang, Deeter, T., Berglund, C.N., Pease, R.F.W., Lee, J., McCord, M.A.
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)

by BERGLUND, C., NEIL
Year of Publication 31.08.2005

by BERGLUND, C., NEIL
Year of Publication 14.10.2004

by BERGLUND C. NEIL
Year of Publication 12.10.2004