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Search Results - "丁杰钦 陈特超 林伯奇 龙长林 杨一鸣 龚杰洪"
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影响SiC外延生长速率的相关因素探讨
by
丁杰钦 陈特超 林伯奇 龙长林 杨一鸣 龚杰洪
Published in
电子工业专用设备
(2017)
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SiC外延炉加热系统的设计
by
陈特超 林伯奇 龙长林
肖慧 胡凡 程文静
丁杰钦 杨一鸣 龚杰洪
Published in
电子工业专用设备
(2017)
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Journal Article
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4h-sic
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c/si比
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三层流喷淋头
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加热器
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外延生长
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温度曲线
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Chinese
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