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Method for depositing thin film and thin film deposition system having separate jet orifices for spraying purge gas
by
PARK HEA J
.,
NA SUNG M
Year of Publication
09.11.2005
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Patent
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chemistry
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medicine
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basic electric elements
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chemical surface treatment
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chemistry
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coating material with metallic material
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coating metallic material
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diffusion treatment of metallic material
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English
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esp@cenet
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