Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer
Yeo, Jin-Ho, Nam, Ki-Bong, Kang, Gil-Seon, Hu, Qicheng, Jeong, Chang-Young, Park, Young-Soo, Lee, Seok Jong, Jung, Jaesun, Lee, Seung Hyun, Cho, Deok Hyun, Kim, Mun-Ja, Yoo, Ji-Beom
Published in Materials research express (01.06.2022)
Published in Materials research express (01.06.2022)
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Journal Article
Synthesis of uniform nanometer-thick graphite film on polycrystalline Ni substrate with ultrafine grains
Hu, Qicheng, Nam, Ki-Bong, Yeo, Jin-Ho, Kim, Mun-Ja, Yoo, Ji-Beom
Published in Carbon (New York) (15.06.2021)
Published in Carbon (New York) (15.06.2021)
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Journal Article
A way to improve the uniformity of nanometer-thickness graphite film synthesized on polycrystalline Ni substrate: From large grain to small grain
Hu, Qicheng, Kim, Seul-Gi, Nam, Ki-Bong, Yeo, Jin-Ho, Kim, Tae-Sung, Kim, Mun-Ja, Yoo, Ji-Beom
Published in Carbon (New York) (01.04.2019)
Published in Carbon (New York) (01.04.2019)
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Journal Article
PELLICLE FOR EUV EXPORSURE AND METHOD FOR MANUFACTURING THE SAME
YOO JI BEOM, JEONG CHANGYOUNG, NAM KI BONG, YOO BYUNGCHUL, KIM MUN JA, YEO JIN HO
Year of Publication 27.12.2023
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Year of Publication 27.12.2023
Patent
Method of manufacturing Pellicle structure
YOO JI BEOM, JEONG CHANGYOUNG, NAM KI BONG, KIM MUN JA, YEO JIN HO, HU QICHENG
Year of Publication 05.09.2023
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Year of Publication 05.09.2023
Patent
METHODS OF MANUFACTURING A PELLICLE HAVING A GRAPHITE LAYER
YOO JI BEOM, NAM KI BONG, JEONG CHANG YOUNG, KIM MUN JA, YEO JIN HO, HU QICHENG
Year of Publication 10.11.2022
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Year of Publication 10.11.2022
Patent
The production of a flexible electroluminescent device on polyethylene terephthalate films using transparent conducting carbon nanotube electrode
Kim, Mun Ja, Shin, Dong Wook, Kim, Jin-Young, Park, Shang Hyeun, Han, In taek, Yoo, Ji Beom
Published in Carbon (New York) (01.12.2009)
Published in Carbon (New York) (01.12.2009)
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Journal Article
APPARATUS GENERATING EXTREME ULTRAVIOLETEUV MANUFACTURING METHOD OF THE SAME AND EUV SYSTEM
YOO JI BEOM, YOO BYUNG CHUL, NA JI HOON, LEE HAK SEOK, CHO HYUN JUNE, SUNG JAE WHAN, KIM MUN JA, JEONG MYEONG JIN
Year of Publication 07.06.2022
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Year of Publication 07.06.2022
Patent