COMPENSATING THICKNESS VARIATIONS IN SUBSTRATES FOR OPTICAL DEVICES
XU, Frank Y, MILLER, Michael Nevin, ONG, Ryan Jason, SINGH, Vikramjit, FRISCH, Julie, TRAUB, Matthew, RUGG, Stephen, TEKOLSTE, Robert Dale, LUO, Kang
Year of Publication 14.12.2023
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Year of Publication 14.12.2023
Patent