ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
Arnold, John C, Felix, Nelson M, Mignot, Yann A.M, Liu, Chi-Chun, DeSilva, Anuja E, Sieg, Stuart A
Year of Publication 20.08.2020
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Year of Publication 20.08.2020
Patent
Alternating hardmasks for tight-pitch line formation
Arnold, John C, Felix, Nelson M, Liu, Chi-Chun, DeSilva, Anuja E, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 03.03.2020
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Year of Publication 03.03.2020
Patent
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
Arnold, John C, Felix, Nelson M, Mignot, Yann A.M, Liu, Chi-Chun, DeSilva, Anuja E, Sieg, Stuart A
Year of Publication 06.12.2018
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Year of Publication 06.12.2018
Patent
Alternating hardmasks for tight-pitch line formation
Arnold, John C, Felix, Nelson M, Liu, Chi-Chun, DeSilva, Anuja E, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 16.10.2018
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Year of Publication 16.10.2018
Patent
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
Arnold, John C, Felix, Nelson M, Mignot, Yann A.M, Liu, Chi-Chun, DeSilva, Anuja E, Sieg, Stuart A
Year of Publication 20.09.2018
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Year of Publication 20.09.2018
Patent
Self aligned conductive lines
Penny Christopher J, Felix Nelson M, DeSilva Anuja E, Saulnier Nicole A, Clevenger Lawrence A, Kanakasabapathy Sivananda K, Quon Roger A, Mignot Yann A. M, Burns Sean D
Year of Publication 06.03.2018
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Year of Publication 06.03.2018
Patent
SELF ALIGNED CONDUCTIVE LINES
Penny Christopher J, Felix Nelson M, DeSilva Anuja E, Saulnier Nicole A, Clevenger Lawrence A, Kanakasabapathy Sivananda K, Quon Roger A, Mignot Yann A. M, Burns Sean D
Year of Publication 14.12.2017
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Year of Publication 14.12.2017
Patent
Self aligned conductive lines
Penny Christopher J, Felix Nelson M, DeSilva Anuja E, Saulnier Nicole A, Clevenger Lawrence A, Kanakasabapathy Sivananda K, Quon Roger A, Mignot Yann A. M, Burns Sean D
Year of Publication 10.10.2017
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Year of Publication 10.10.2017
Patent