Search Results - "LU Hsin-Hsien" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 04.07.2023

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Patent

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 04.10.2022

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Patent

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 04.08.2020

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Patent

BRUSH CLEANING APPARATUS, CHEMICAL-MECHANICAL POLISHING (CMP) SYSTEM AND WAFER PROCESSING METHOD

BRUSH CLEANING APPARATUS, CHEMICAL-MECHANICAL POLISHING (CMP) SYSTEM AND WAFER PROCESSING METHOD

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 23.01.2020

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Patent

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 10.12.2019

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Patent

CARRIER HEAD HAVING RETAINER RING, POLISHING SYSTEM INCLUDING THE CARRIER HEAD AND METHOD OF USING THE POLISHING SYSTEM

CARRIER HEAD HAVING RETAINER RING, POLISHING SYSTEM INCLUDING THE CARRIER HEAD AND METHOD OF USING THE POLISHING SYSTEM

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 28.11.2019

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Patent

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 13.08.2019

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Patent

Semiconductor Device, Tool, and Method of Manufacturing

Semiconductor Device, Tool, and Method of Manufacturing

by Li, Meng-Hsien, Lu, Hsin-Hsien
Year of Publication 28.03.2019

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Patent

BRUSH CLEANING APPARATUS, CHEMICAL-MECHANICAL POLISHING (CMP) SYSTEM AND WAFER PROCESSING METHOD

BRUSH CLEANING APPARATUS, CHEMICAL-MECHANICAL POLISHING (CMP) SYSTEM AND WAFER PROCESSING METHOD

by Lu, Hsin-Hsien, Lin, Chang-Sheng
Year of Publication 13.12.2018

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Patent

Semiconductor Device, Tool, and Method of Manufacturing

Semiconductor Device, Tool, and Method of Manufacturing

by Li, Meng-Hsien, Lu, Hsin-Hsien
Year of Publication 06.12.2018

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Patent

CARRIER HEAD HAVING RETAINER RING, POLISHING SYSTEM INCLUDING THE CARRIER HEAD AND METHOD OF USING THE POLISHING SYSTEM

CARRIER HEAD HAVING RETAINER RING, POLISHING SYSTEM INCLUDING THE CARRIER HEAD AND METHOD OF USING THE POLISHING SYSTEM

by Lin Chang-Sheng, Lu Hsin-Hsien
Year of Publication 29.06.2017

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Patent

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

by Lin Chang-Sheng, Lu Hsin-Hsien
Year of Publication 21.03.2017

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Patent

Retainer ring

Retainer ring

by Lien Kuo-Cheng, Lu Hsin-Hsien
Year of Publication 06.09.2016

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Patent

Conductive chemical mechanical planarization polishing pad

Conductive chemical mechanical planarization polishing pad

by Lin Chang-Sheng, Lu Hsin-Hsien
Year of Publication 16.08.2016

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Patent

Apparatus, method, and composition for far edge wafer cleaning

Apparatus, method, and composition for far edge wafer cleaning

by Chang Ting-Kui, Lu Hsin-Hsien, Tsai Jung-Tsan
Year of Publication 21.02.2017

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Patent

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

by Lin Kuo-Yin, Tsai Teng-Chun, Lin Chang-Sheng, Lien Kuo-Cheng, Liu Wen-Kuei, Lee Shen-Nan, Chou Yu-Wei, Lu Hsin-Hsien
Year of Publication 26.12.2017

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Patent

WAFER BACK-SIDE POLISHING SYSTEM AND METHOD FOR INTEGRATED CIRCUIT DEVICE MANUFACTURING PROCESSES

WAFER BACK-SIDE POLISHING SYSTEM AND METHOD FOR INTEGRATED CIRCUIT DEVICE MANUFACTURING PROCESSES

by Lin Kuo-Yin, Tsai Teng-Chun, Lin Chang-Sheng, Lien Kuo-Cheng, Liu Wen-Kuei, Lee Shen-Nan, Chou Yu-Wei, Lu Hsin-Hsien
Year of Publication 04.05.2017

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Patent

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

by Lin Kuo-Yin, Tsai Teng-Chun, Lin Chang-Sheng, Lien Kuo-Cheng, Liu Wen-Kuei, Lee Shen-Nan, Chou Yu-Wei, Lu Hsin-Hsien
Year of Publication 31.01.2017

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Patent

POLISHING COMPOSITIONS AND METHODS OF USE THEREOF

POLISHING COMPOSITIONS AND METHODS OF USE THEREOF

by LIANG, Yannan, HU, Bin, HSIEN LU, Hsin
Year of Publication 05.10.2023

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Patent

Apparatus and method for pre-conditioning CMP polishing pad

Apparatus and method for pre-conditioning CMP polishing pad

by HSIN-HSIEN LU, WENIH CHIOU, LIANG-GUANG CHEN, CHIA CHUANG
Year of Publication 28.03.2006

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Patent