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Low-cost electrostatic clamp with fast declamp time
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Year of Publication 01.03.2009
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Workpiece handling scan arm for ion implantation system
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Workpiece handling scan arm for ion implantation system
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Year of Publication 26.08.2009
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Workpiece handling scan arm for ion implantation system
PHARAND, MICHEL, MITCHELL, ROBERT, ARSENAULT, WAYNE, LAFONTAINE, MARVIN, WEED, STEVEN, EIRIKSSON, ARI, PATHAK, SHANTANU, BECKEL, DONOVAN, PUROHIT, ASHWIN
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Year of Publication 01.06.2008
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