Search Results - "KEIL DOUGLAS L" :: K.UTB vyhledávací portál

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING DECHUCKING IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by KEIL DOUGLAS L, BOOTH JEAN PAUL
Year of Publication 16.05.2011

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING STRIKE STEP IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by KEIL DOUGLAS L, BOOTH JEAN PAUL
Year of Publication 15.04.2011

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PLASMA-FACING PROBE ARRANGEMENT INCLUDING VACUUM GAP FOR USE IN A PLASMA PROCESSING CHAMBER

by KEIL DOUGLAS L, BOOTH JEAN PAUL
Year of Publication 15.04.2011

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PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING IN-SITU ARCING EVENTS IN A PLASMA PROCESSING CHAMBER

by KEIL DOUGLAS L, BOOTH JEAN PAUL
Year of Publication 15.04.2011

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CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

by KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
Year of Publication 05.09.2014

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PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING PLASMA INSTABILITIES IN A PLASMA PROCESSING CHAMBER

by KEIL DOUGLAS L, NAGAI MIKIO, BOOTH JEAN PAUL
Year of Publication 15.04.2011

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FORMATION METHOD OF MEMORY CELL CAPACITOR PLATE IN MEMORY CELL CAPACITOR STRUCTURE

by DOUGLAS L KEIL
Year of Publication 27.09.2012

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Passive capacitively-coupled electrostatic (CCE) probe arrangement for detecting in-situ arcing events in a plasma processing chamber

by KEIL DOUGLAS L, BOOTH JEAN-PAUL
Year of Publication 22.04.2015

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Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof

by KEIL DOUGLAS L, BOOTH JEAN-PAUL
Year of Publication 15.07.2014

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METHODS OF FORMING MEMORY CELL CAPACITOR PLATES IN MEMORY CELL CAPACITOR STRUCTURES

by KEIL DOUGLAS L
Year of Publication 14.12.2006

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Method for controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement

by KEIL, DOUGLAS L
Year of Publication 01.10.2013

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PLASMA-FACING PROBE ARRANGEMENT INCLUDING VACUUM GAP FOR USE IN A PLASMA PROCESSING CHAMBER

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS, L
Year of Publication 06.05.2010

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING STRIKE STEP IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS, L
Year of Publication 22.04.2010

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PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING IN-SITU ARCING EVENTS IN A PLASMA PROCESSING CHAMBER

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS, L
Year of Publication 22.04.2010

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING DECHUCKING IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS L
Year of Publication 25.03.2010

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PLASMA-FACING PROBE ARRANGEMENT INCLUDING VACUUM GAP FOR USE IN A PLASMA PROCESSING CHAMBER

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS, L
Year of Publication 14.01.2010

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING DECHUCKING IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by KEIL DOUGLAS L, BOOTH JEAN-PAUL
Year of Publication 14.01.2010

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING STRIKE STEP IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS, L
Year of Publication 14.01.2010

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CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETECTING DECHUCKING IN A PLASMA PROCESSING CHAMBER AND METHODS THEREOF

by BOOTH, JEAN-PAUL, KEIL, DOUGLAS L
Year of Publication 14.01.2010

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CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

by DOUGLAS L KEIL, MOHAMED SABRI, EDWARD AUGUSTYNIAK, KARL LEESER, RAMKISHAN RAO LINGAMPALLI, CODY BARNETT
Year of Publication 18.09.2014

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