Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
MAYER STEVEN T, DREWERY JOHN S, BROADBENT ELIOT K, CONTOLINI ROBERT J
Year of Publication 23.03.2004
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Year of Publication 23.03.2004
Patent
Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
MAYER STEVEN T, DREWERY JOHN S, BROADBENT ELIOT K, CONTOLINI ROBERT J
Year of Publication 20.06.2002
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Year of Publication 20.06.2002
Patent