Method for calibrating a two-wavelength pyrometer, method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer
Kaspari, Christian, Zettler, Joerg-Thomas, Cornwell, David William, Nash, James Henry, Haberland, Kolja Lutz
Year of Publication 16.09.2020
Get full text
Year of Publication 16.09.2020
Patent
Method for calibrating a two-wavelength pyrometer, method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA LUTZ, CORNWELL, DAVID WILLIAM, NASH, JAMES HENRY, KASPARI, CHRISTIAN, ZETTLER, JOERG-THOMAS
Year of Publication 24.06.2015
Get full text
Year of Publication 24.06.2015
Patent
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 18.07.2012
Get full text
Year of Publication 18.07.2012
Patent
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 25.01.2012
Get full text
Year of Publication 25.01.2012
Patent
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 14.09.2011
Get full text
Year of Publication 14.09.2011
Patent
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 17.11.2010
Get full text
Year of Publication 17.11.2010
Patent