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Year of Publication 27.08.2024
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증가된 디지털 포토리소그래피 정밀도를 위한 브릿지 보강재들
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Year of Publication 30.01.2024
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Year of Publication 30.01.2024
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METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
FUNG PRESTON, JOHNSTON BENJAMIN M, SCREWS SEAN, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 09.01.2023
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Year of Publication 09.01.2023
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평면 패널 툴에 기판을 신속하게 로딩하기 위한 방법
FUNG PRESTON, JOHNSTON BENJAMIN M, SCREWS SEAN, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 08.02.2021
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Year of Publication 08.02.2021
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리소그래피 시스템을 위한 열 안정화를 위한 동적 냉각 제어
TAO WEIMIN, MANENS ANTOINE P, CORRIVEAU DAVID MICHAEL, JOHNSTON BENJAMIN M, LEE CHEUK MING, YOO JAE MYUNG
Year of Publication 05.10.2021
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Year of Publication 05.10.2021
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Capacitive displacement sensor for detecting planar submicrometer motion
Avramov-Zamurovic, Svetlana, Yoo, Jae Myung, Dagalakis, Nicholas G
Published in Review of scientific instruments (01.06.2016)
Published in Review of scientific instruments (01.06.2016)
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Method for fast loading substrates in a flat panel tool
Lee, Cheuk Ming, Johnston, Benjamin M, Yoo, Jae Myung, Fung, Preston, Screws, Sean
Year of Publication 13.08.2024
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Year of Publication 13.08.2024
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BRIDGE STIFFENERS FOR INCREASED DIGITAL PHOTOLITHOGRAPHY PRECISION
JOHNSTON, Benjamin M, YOO, Jae Myung, ARELLANO, Jorge, CORRIVEAU, David, SRIRANGARAJAN, Vasuman Ghanapaati, FUNG, Preston, LEE, Cheuk
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
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METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
JOHNSTON, Benjamin M, YOO, Jae Myung, SCREWS, Sean, FUNG, Preston, LEE, Cheuk Ming
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
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Method for fast loading substrates in a flat panel tool
Lee, Cheuk Ming, Johnston, Benjamin M, Yoo, Jae Myung, Fung, Preston, Screws, Sean
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
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Dynamic cooling control for thermal stabilization for lithography system
Lee, Cheuk Ming, Johnston, Benjamin M, Yoo, Jae Myung, Tao, WeiMin, Manens, Antoine P, Corriveau, David Michael
Year of Publication 18.05.2021
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Year of Publication 18.05.2021
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METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
JOHNSTON, Benjamin M, YOO, Jae Myung, SCREWS, Sean, FUNG, Preston, LEE, Cheuk Ming
Year of Publication 02.04.2020
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Year of Publication 02.04.2020
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METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL
JOHNSTON, Benjamin M, YOO, Jae Myung, SCREWS, Sean, FUNG, Preston, LEE, Cheuk Ming
Year of Publication 02.04.2020
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Year of Publication 02.04.2020
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DYNAMIC COOLING CONTROL FOR THERMAL STABILIZATION FOR LITHOGRAPHY SYSTEM
JOHNSTON, Benjamin M, YOO, Jae Myung, MANENS, Antoine P, CORRIVEAU, David Michael, LEE, Cheuk Ming, TAO, WeiMin
Year of Publication 14.01.2021
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Year of Publication 14.01.2021
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INTERFEROMETRY SYSTEM AND METHODS FOR SUBSTRATE PROCESSING
YOO, Jae Myung, CORRIVEAU, David, GOMES, Glen, LEE, Cheuk Ming, NGUYEN, Thang Duc, JOHNSTON, Benjamin
Year of Publication 09.01.2020
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Year of Publication 09.01.2020
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