Squeeze-film air damping of a torsion mirror at a finite tilting angle
Bao, Minhang, Sun, Yuanchen, Zhou, Jia, Huang, Yiping
Published in Journal of micromechanics and microengineering (01.11.2006)
Published in Journal of micromechanics and microengineering (01.11.2006)
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Journal Article
Squeeze-film air damping of thick hole-plate
Bao, Minhang, Yang, Heng, Sun, Yuancheng, Wang, Yuelin
Published in Sensors and actuators. A, Physical (15.11.2003)
Published in Sensors and actuators. A, Physical (15.11.2003)
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Journal Article
Conference Proceeding
Self-excited piezoelectric microcantilever for gas detection
Zhou, Jia, Li, Po, Zhang, Song, Huang, Yiping, Yang, Pengyuan, Bao, Minhang, Ruan, Gang
Published in Microelectronic engineering (01.08.2003)
Published in Microelectronic engineering (01.08.2003)
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Journal Article
Effects of electrostatic forces generated by the driving signal on capacitive sensing devices
Bao, Minhang, Yang, Heng, Yin, Hao, Shen, Shaoqun
Published in Sensors and actuators. A. Physical. (01.09.2000)
Published in Sensors and actuators. A. Physical. (01.09.2000)
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Journal Article
Batch derivation of piezoresistive coefficient tensor by matrix algebra
Bao, Minhang, Huang, Yiping
Published in Journal of micromechanics and microengineering (01.03.2004)
Published in Journal of micromechanics and microengineering (01.03.2004)
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Journal Article
A novel bulk micromachined gyroscope based on a rectangular beam-mass structure
Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun
Published in Sensors and actuators. A. Physical. (28.02.2002)
Published in Sensors and actuators. A. Physical. (28.02.2002)
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Journal Article
A generalized energy transfer model for squeeze-film air damping in the free molecular regime
Lu, Cunhao, Li, Pu, Bao, Minhang, Fang, Yuming
Published in Journal of micromechanics and microengineering (01.08.2018)
Published in Journal of micromechanics and microengineering (01.08.2018)
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Journal Article
A fast and accurate calibration method for high sensitivity pressure transducers
Bao, Minhang, Sun, Yuancheng, Yang, Heng, Wang, Jinsuo
Published in Sensors and actuators. A, Physical (15.11.2003)
Published in Sensors and actuators. A, Physical (15.11.2003)
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Journal Article
Conference Proceeding
A micromachined piezoresistive angular rate sensor with a composite beam structure
Li, Xinxin, Bao, Minhang, Yang, Heng, Shen, Shaoqun, Lu, Deren
Published in Sensors and actuators. A. Physical. (16.02.1999)
Published in Sensors and actuators. A. Physical. (16.02.1999)
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Journal Article
Two-dimensional excitation operation mode and phase detection scheme for vibratory gyroscopes
Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun
Published in Journal of micromechanics and microengineering (01.05.2002)
Published in Journal of micromechanics and microengineering (01.05.2002)
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Journal Article
A novel technique for measuring etch rate distribution of Si
Yang, Heng, Bao, Minhang, Shen, Shaoqun, Li, Xinxin, Zhang, Dacheng, Wu, Guoyin
Published in Sensors and actuators. A. Physical. (01.02.2000)
Published in Sensors and actuators. A. Physical. (01.02.2000)
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Journal Article
Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOH
Li, Xinxin, Lin, Rongming, Miao, Jianmin, Bao, Minhang
Published in Journal of micromechanics and microengineering (01.09.2000)
Published in Journal of micromechanics and microengineering (01.09.2000)
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Journal Article
composite beam structure formed by masked-maskless etch of silicon
Li, Xinxin, Yang, Heng, Bao, Minhang, Shen, Shaoqun, Wang, Weiyuan
Published in Journal of micromechanics and microengineering (01.09.1999)
Published in Journal of micromechanics and microengineering (01.09.1999)
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Journal Article
Energy transfer model for squeeze-film air damping in low vacuum (for vibratory microsensors)
Bao, M, Yang, H, Yin, H, Sun, Y
Published in Journal of micromechanics and microengineering (01.05.2002)
Published in Journal of micromechanics and microengineering (01.05.2002)
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Journal Article
A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity
Jia Zhou, Po Li, Song Zhang, Feng Zhou, Yiping Huang, Pengyuan Yang, Minhang Bao
Published in Proceedings - IEEE International Symposium on Applications of Ferroelectrics (2002)
Published in Proceedings - IEEE International Symposium on Applications of Ferroelectrics (2002)
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Conference Proceeding
Analysis and design of a four-terminal silicon pressure sensor at the centre of a diaphragm
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Journal Article
Conference Proceeding