Method of controlling a lithographic apparatus and device manufacturing method control system for a lithographic apparatus and lithographic apparatus
LUCAS JORN KJELD, BIJNEN FRANCISCUS GODEFRIDUS CASPER, HULSEBOS EDO MARIA, BRINKHOF RALPH, VERHEES LOEK JOHANNES PETRUS, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, HERES PIETER JACOB, VAN DONKELAAR INGRID MARGARETHA ARDINA
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
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리소그래피 장치의 제어 방법 및 디바이스의 제조 방법, 리소그래피 장치를 위한 제어 시스템 및 리소그래피 장치
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Year of Publication 14.06.2018
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Year of Publication 14.06.2018
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METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPHIC APPARATUS AND AN APPARATUS FOR CONTROLLING LITHOGRAPHIC PROCESSING BY A LITHOGRAPHIC APPARATUS
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Year of Publication 17.09.2012
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METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
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Year of Publication 18.08.2022
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Year of Publication 18.08.2022
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METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
JANSEN, Erik, NAGY, István, DUMAN, Özer, HERMANS, Rudolf, MATTAAR, Thomas, VAN GILS, Petrus, VAN DEN NIEUWELAAR, Norbertus, GIJSBERTSEN, Arjan, HERES, Pieter
Year of Publication 04.02.2021
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Year of Publication 04.02.2021
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Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Bijnen, Franciscus Godefridus Casper, Tinnemans, Patricius Aloysius Jacobus, Lucas, Jorn Kjeld, Hulsebos, Edo Maria, Heres, Pieter Jacob, Van Donkelaar, Ingrid Margaretha Ardina, Brinkhof, Ralph, Verhees, Loek Johannes Petrus
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
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METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
Bijnen, Franciscus Godefridus Casper, Tinnemans, Patricius Aloysius Jacobus, Lucas, Jorn Kjeld, Hulsebos, Edo Maria, Heres, Pieter Jacob, Van Donkelaar, Ingrid Margaretha Ardina, Brinkhof, Ralph, Verhees, Loek Johannes Petrus
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
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Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Bijnen, Franciscus Godefridus Casper, Tinnemans, Patricius Aloysius Jacobus, Lucas, Jorn Kjeld, Hulsebos, Edo Maria, Heres, Pieter Jacob, Van Donkelaar, Ingrid Margaretha Ardina, Brinkhof, Ralph, Verhees, Loek Johannes Petrus
Year of Publication 14.04.2020
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Year of Publication 14.04.2020
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METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
VAN DONKELAAR, Ingrid Margaretha Ardina, HULSEBOS, Edo Maria, VERHEES, Loek Johannes Petrus, LUCAS, Jorn Kjeld, TINNEMANS, Patricius Aloysius Jacobus, BIJNEN, Franciscus Godefridus Casper, BRINKHOF, Ralp, HERES, Pieter Jacob
Year of Publication 29.08.2019
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Year of Publication 29.08.2019
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Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Bijnen, Franciscus Godefridus Casper, Tinnemans, Patricius Aloysius Jacobus, Lucas, Jorn Kjeld, Hulsebos, Edo Maria, Heres, Pieter Jacob, Van Donkelaar, Ingrid Margaretha Ardina, Brinkhof, Ralph, Verhees, Loek Johannes Petrus
Year of Publication 25.06.2019
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Year of Publication 25.06.2019
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METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
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Year of Publication 04.10.2018
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Year of Publication 04.10.2018
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Method of determining a mark measurement sequence, stage apparatus, lithographic apparatus, inspection apparatus, and computer program product
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Year of Publication 11.11.2022
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Year of Publication 11.11.2022
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Method of determining a mark measurement sequence and stage apparatus
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Year of Publication 16.05.2022
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Year of Publication 16.05.2022
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METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
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Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus
HERMANS, RUDOLF MICHIEL, MATTAAR, THOMAS AUGUSTUS, JANSEN, ERIK, HERES, PIETER JACOB, VAN GILS, PETRUS FRANCISCUS, NAGY, ISTVAN, VAN DEN NIEUWELAAR, NORBERTUS JOSEPHUS MARTINUS, GIJSBERTSEN, ARJAN, DUMAN, OZER
Year of Publication 01.06.2021
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Year of Publication 01.06.2021
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METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPHIC APPARATUS AND AN APPARATUS FOR CONTROLLING LITHOGRAPHIC PROCESSING BY A LITHOGRAPHIC APPARATUS
KEMENADE, MARC, HERES, PIETER, LYULINA, IRINA, TENNER, MANFRED, SANDEN, STEFAN, SLOTBOOM, DAAN, SIMONS, HUBERTUS
Year of Publication 28.08.2012
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Year of Publication 28.08.2012
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METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
LUCAS JORN KJELD, BIJNEN FRANCISCUS GODEFRIDUS CASPER, HULSEBOS EDO MARIA, BRINKHOF RALPH, VERHEES LOEK JOHANNES PETRUS, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, HERES PIETER JACOB, VAN DONKELAAR INGRID MARGARETHA ARDINA
Year of Publication 03.08.2018
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Year of Publication 03.08.2018
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METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPHIC APPARATUS AND AN APPARATUS FOR CONTROLLING LITHOGRAPHIC PROCESSING BY A LITHOGRAPHIC APPARATUS
SLOTBOOM DAAN MAURITS, LYULINA IRINA, VAN KEMENADE MARC, HERES PIETER JACOB, TENNER MANFRED GAWEIN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, SIMONS HUBERTUS JOHANNES GERTRUDUS
Year of Publication 30.08.2012
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Year of Publication 30.08.2012
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Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS, BRINKHOF, RALPH, VERHEES, LOEK JOHANNES PETRUS, HERES, PIETER JACOB, LUCAS, JORN KJELD, BIJNEN, FRANCISCUS GODEFRIDUS CASPER, HULSEBOS, EDO MARIA, VAN DONKELAAR, INGRID MARGARETHA ARDINA
Year of Publication 01.03.2018
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Year of Publication 01.03.2018
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Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS, BRINKHOF, RALPH, VERHEES, LOEK JOHANNES PETRUS, HERES, PIETER JACOB, LUCAS, JORN KJELD, BIJNEN, FRANCISCUS GODEFRIDUS CASPER, HULSEBOS, EDO MARIA, VAN DONKELAAR, INGRID MARGARETHA ARDINA
Year of Publication 01.07.2017
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Year of Publication 01.07.2017
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