Short-period multilayer X-ray mirrors
Andreev, S. S., Bibishkin, M. S., Chkhalo, N. I., Kluenkov, E. B., Prokhorov, K. A., Salashchenko, N. N., Zorina, M. V., Schafers, F., Shmaenok, L. A.
Published in Journal of synchrotron radiation (01.09.2003)
Published in Journal of synchrotron radiation (01.09.2003)
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Journal Article
Gas-Monitor Detector for Intense and Pulsed VUV/EUV Free-Electron Laser Radiation
Sorokin, A A, Bobashev, S V, Feldhaus, J, Gerth, Ch, Gottwald, A, Hahn, U, Kroth, U, Richter, M, Shmaenok, L A, Steeg, B, Tiedtke, K, Treusch, R
Published in AIP conference proceedings (12.05.2004)
Published in AIP conference proceedings (12.05.2004)
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Journal Article
Extreme Ultraviolet Spectroscopy of a Laser Plasma Source for Lithography
Shevelko, A P, Shmaenok, L A, Churilov, S S, Bastiaensen, R K F J, Bijkerk, F
Published in Physica scripta (01.02.1998)
Published in Physica scripta (01.02.1998)
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Journal Article
Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment
Louis, E., Voorma, H.-J., Koster, N.B., Shmaenok, L., Bijkerk, F., Schlatmann, R., Verhoeven, J., Platonov, Yu.Ya, van Dorssen, G.E., Padmore, H.A.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
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Journal Article
Multilayer dispersion optics for X-ray radiation
Andreev, S.S, Mertins, H.-Ch, Platonov, Yu.Ya, Salashchenko, N.N, Schaefers, F, Shamov, E.A, Shmaenok, L.A
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
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Journal Article
A high-power, low-contamination laser plasma source for Extreme UV lithography
Bijkerk, F., Shmaenok, L.A., Shevelko, A.P., Bastiaensen, R.K.F.J., Bruineman, C., van Honk, A.G.J.R.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Journal Article
Conference Proceeding
Extreme UV lithography: A new laser plasma target concept and fabrication of multilayer reflection masks
Bijkerk, F., Shmaenok, L.A., Louis, E., Voorma, H.J., Koster, N.B., Bruineman, C., Bastiaensen, R.K.F.J., van der Drift, E.W.J.M., Romijn, J., de Groot, L.E.M., Rousseeuw, B.A.C., Zijlstra, T., Platonov, Yu.Ya, Salashchenko, N.N.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Journal Article
Conference Proceeding
Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm)
Andreev, S.S., Barysheva, M.M., Chkhalo, N.I., Gusev, S.A., Pestov, A.E., Polkovnikov, V.N, Salashchenko, N.N., Shmaenok, L.A., Vainer, Yu.A., Zuev, S.Yu
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2009)
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Journal Article
Issues of laser plasma sources for soft x-ray projection lithography
Shmaenok, L., Bijkerk, F., Louis, E., van Honk, A., van der Wiel, M.J., Platonov, Yu, Shevelko, A., Mitrofanov, A., Frowein, H., Nicolaus, B., Voβ, F., Désor, R.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
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Journal Article
Absolute photometry of pulsed intense fluxes of ultrasoft X-ray radiation
Bobashev, S V, Golubev, A V, Platonov, Yu Ya, Salashchenko, N N, Shmaenok, L A, Volkov, G S, Zaitsev, V I
Published in Physica scripta (01.04.1991)
Published in Physica scripta (01.04.1991)
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Journal Article
Development of low-energy X-ray fluorescence micro-distribution analysis using a laser plasma X-ray source and multilayer optics
STUIK, R, SHMAENOK, L. A, FLEDDERUS, H, ANDREEV, S. S, SHAMOV, E. A, ZUEV, S. Yu, SALASHCHENKO, N. N, BIJKERK, F
Published in Journal of analytical atomic spectrometry (1999)
Published in Journal of analytical atomic spectrometry (1999)
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Conference Proceeding
Journal Article
Demonstration of Laser Induced X-Ray Generation in an Expanding Laser Produced Plasma
Simanovskii, DM, Gladskikh, AN, Shmaenok, LA, Bobashev, SV
Published in Physical review letters (29.07.1996)
Published in Physical review letters (29.07.1996)
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Journal Article
Soft x-ray projection lithography using a high repetition rate laser-induced x-ray source for sub- 100 nanometer lithography processes
Louis, E., Bijkerk, F., Shmaenok, L., Voorma, H.-J., van der Wiel, M.J., Schlatmann, R., Verhoeven, J., van der Drift, E.W.J.M., Romijn, J., Rousseeuw, B.A.C., Voβ, F., Desor, R., Nikolaus, B.
Published in Microelectronic engineering (01.04.1993)
Published in Microelectronic engineering (01.04.1993)
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Journal Article
SIMS study of annealing effect on element distribution in free-standing Al/Si and Zr/ZrSi2 multilayer films
Drozdov, M. N., Drozdov, Yu. N., Kluenkov, E. B., Luchin, V. I., Lopatin, A. Ya, Salashchenko, N. N., Tsybin, N. N., Shmaenok, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2010)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2010)
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