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MEMS device and interconnects for same

MEMS device and interconnects for same

by ZEE STEPHEN, GANTI SURYAPRAKASH, CHUNG WONSUK
Year of Publication 17.01.2012

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Patent

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

by CHUNG WONSUK, SASAGAWA TERUO, ZEE STEVE
Year of Publication 22.11.2011

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Patent

PATTERNING OF MECHANICAL LAYER IN MEMS TO REDUCE STRESSES AT SUPPORTS

PATTERNING OF MECHANICAL LAYER IN MEMS TO REDUCE STRESSES AT SUPPORTS

by CHUNG, WONSUK, TUNG, MING-HAU
Year of Publication 11.02.2009

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Patent

PATTERNING OF MECHANICAL LAYER IN MEMS TO REDUCE STRESSES AT SUPPORTS

PATTERNING OF MECHANICAL LAYER IN MEMS TO REDUCE STRESSES AT SUPPORTS

by CHUNG, WONSUK, TUNG, MING-HAU
Year of Publication 28.08.2008

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Patent

Patterning of mechanical layer in MEMS to reduce stresses at supports

Patterning of mechanical layer in MEMS to reduce stresses at supports

by TUNG MING-HAU, CHUNG WONSUK
Year of Publication 29.07.2008

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Patent

PATTERNING OF MECHANICAL LAYER IN MEMS TO REDUCE STRESSES AT SUPPORTS

PATTERNING OF MECHANICAL LAYER IN MEMS TO REDUCE STRESSES AT SUPPORTS

by CHUNG, WONSUK, TUNG, MING-HAU
Year of Publication 08.05.2008

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Patent

MEMS DEVICE AND INTERCONNECTS FOR SAME

MEMS DEVICE AND INTERCONNECTS FOR SAME

by ZEE STEPHEN, GANTI SURYAPRAKASH, CHUNG WONSUK
Year of Publication 12.08.2010

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Patent

Patterning of mechanical layer in MEMS to reduce stresses at supports

Patterning of mechanical layer in MEMS to reduce stresses at supports

by TUNG MING-HAU, CHUNG WONSUK
Year of Publication 06.12.2007

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Patent

MEMS device and interconnects for same

MEMS device and interconnects for same

by ZEE STEPHEN, GANTI SURYAPRAKASH, CHUNG WONSUK
Year of Publication 27.04.2010

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Patent

MEMS DEVICE AND ELECTRICAL INTERCONNECTS FOR SAME

MEMS DEVICE AND ELECTRICAL INTERCONNECTS FOR SAME

by ZEE, STEPHEN, CHUNG, WONSUK, GANTI, SURYAPRAKASH
Year of Publication 02.10.2008

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Patent

MEMS DEVICE AND INTERCONNECTS FOR SAME

MEMS DEVICE AND INTERCONNECTS FOR SAME

by ZEE, STEPHEN, CHUNG, WONSUK, GANTI, SURYAPRAKASH
Year of Publication 17.07.2008

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Patent

MEMS DEVICE AND INTERCONNECTS FOR SAME

MEMS DEVICE AND INTERCONNECTS FOR SAME

by ZEE STEPHEN, GANTI SURYAPRAKASH, CHUNG WONSUK
Year of Publication 26.06.2008

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Patent

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

by CHUNG WONSUK, SASAGAWA TERUO, ZEE STEVE
Year of Publication 03.06.2008

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Patent

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

by WEBSTER JAMES RANDOLPH, TU THANH NGHIA, CHUNG WONSUK, YAN XIAOMING
Year of Publication 22.01.2013

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Patent

MEMS DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME

MEMS DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME

by GANTI, SURYA, PRAKASH, MILES, MARK, W, SASAGAWA, TERUO, CHUI, CLARENCE, CHUNG, WONSUK, KOTHARI, MANISH, SAMPSELL, JEFFREY, B
Year of Publication 30.08.2013

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Patent

Electromechanical devices having support structures

Electromechanical devices having support structures

by TUNG MING-HAU, SAMPSELL JEFFREY B, MILES MARK W, CHUNG WONSUK, CHUI CLARENCE, SASAGAWA TERUO, KOTHARI MANISH
Year of Publication 01.01.2013

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Patent

Mems devices having support structures and methods of fabricating the same

Mems devices having support structures and methods of fabricating the same

by SASAGAWA, TERUO, SAMPSELL, JEFFREY BRIAN, CHUI, CLARENCE, CHUNG, WONSUK, KOTHARI, MANISH, MILES, MARK W, GANTI, SURYA PRAKASH
Year of Publication 31.10.2012

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Patent

Mems devices having support structures and methods of fabricating the same

Mems devices having support structures and methods of fabricating the same

by SASAGAWA, TERUO, SAMPSELL, JEFFREY BRIAN, CHUI, CLARENCE, CHUNG, WONSUK, KOTHARI, MANISH, MILES, MARK W, GANTI, SURYA PRAKASH
Year of Publication 05.09.2012

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Patent

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES

by WEBSTER JAMES RANDOLPH, TU THANH NGHIA, CHUNG WONSUK, YAN XIAOMING
Year of Publication 03.03.2011

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Patent

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

by WEBSTER JAMES RANDOLPH, TU THANH NGHIA, CHUNG WONSUK, YAN XIAOMING
Year of Publication 14.12.2010

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Patent