Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction
Ren How, Soo, Nayan, Nafarizal, Lias, Jais, Khairul Ahmad, Mohd, Zainizan Sahdan, Mohd, Hafiz Mamat, Mohamad, Rusop Mahmood, Mohamad, Aldalbahi, Ali
Published in Journal of physics. Conference series (01.05.2018)
Published in Journal of physics. Conference series (01.05.2018)
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Journal Article
Influence of discharge power on the intensities of Ar and Ti in high-pressure magnetron sputtering plasma measured using optical emission spectroscopy
Soo Ren How, Nayan, Nafarizal, Lias, Jais
Published in 2016 IEEE International Conference on Semiconductor Electronics (ICSE) (01.08.2016)
Published in 2016 IEEE International Conference on Semiconductor Electronics (ICSE) (01.08.2016)
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Conference Proceeding