Musterausbildungsverfahren unter Anwendung einer lichtinduzierten Ätzunterdrückung
ROSS, GRAEME WILLIAM, BARRY, IAN ERIC, SMITH, PETER GEORGE ROBIN, EASON, ROBERT WILLIAM
Year of Publication 09.04.2009
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Year of Publication 09.04.2009
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STRUKTURIERUNGSVERFAHREN MITTELS LICHTINDUZIERTER ÄTZ-UNTERDRÜCKUNG
ROSS, GRAEME WILLIAM, BARRY, IAN ERIC, SMITH, PETER GEORGE ROBIN, EASON, ROBERT WILLIAM
Year of Publication 15.04.2008
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Year of Publication 15.04.2008
Patent
PATTERN FORMATION METHOD USING LIGHT-INDUCED SUPPRESSION OF ETCHING
ROSS, GRAEME WILLIAM, BARRY, IAN ERIC, SMITH, PETER GEORGE ROBIN, EASON, ROBERT WILLIAM
Year of Publication 26.03.2008
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Year of Publication 26.03.2008
Patent
ETCHING METHOD
BARRY, IAN, ERIC, EASON, ROBERT, WILLIAM, ROSS, GRAEME, WILLIAM, SMITH, PETER, GEORGE, ROBIN
Year of Publication 05.12.2001
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Year of Publication 05.12.2001
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Etching method
ROBERT WILLIAM EASON, PETER GEORGE ROBIN SMITH, IAN ERIC BARRY, GRAEME WILLIAM ROSS
Year of Publication 28.11.2001
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Year of Publication 28.11.2001
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PATTERN FORMATION METHOD USING LIGHT-INDUCED SUPPRESSION OF ETCHING
ROSS, GRAEME WILLIAM, BARRY, IAN ERIC, SMITH, PETER GEORGE ROBIN, EASON, ROBERT WILLIAM
Year of Publication 13.06.2001
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Year of Publication 13.06.2001
Patent
Pattern formation method using light-induced suppression of etching
ROBERT WILLIAM EASON, PETER GEORGE ROBIN SMITH, IAN ERIC BARRY, GRAEME WILLIAM ROSS
Year of Publication 21.02.2000
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Year of Publication 21.02.2000
Patent
PATTERN FORMATION METHOD USING LIGHT-INDUCED SUPPRESSION OF ETCHING
BARRY, IAN, ERIC, EASON, ROBERT, WILLIAM, SMITH, PETER, GEORGE, ROBIN, ROSS, GRAEME, WILLIAM
Year of Publication 10.02.2000
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Year of Publication 10.02.2000
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Etching method
ROBERT WILLIAM EASON, PETER GEORGE ROBIN SMITH, IAN ERIC BARRY, GRAEME WILLIAM ROSS
Year of Publication 02.02.2000
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Year of Publication 02.02.2000
Patent
ETCHING METHOD
BARRY, IAN, ERIC, EASON, ROBERT, WILLIAM, ROSS, GRAEME, WILLIAM, SMITH, PETER, GEORGE, ROBIN
Year of Publication 02.02.2000
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Year of Publication 02.02.2000
Patent
Etching method
ROBERT WILLIAM EASON, PETER GEORGE ROBIN SMITH, IAN ERIC BARRY, GRAEME WILLIAM ROSS
Year of Publication 11.11.1998
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Year of Publication 11.11.1998
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ETCHING METHOD
BARRY, IAN, ERIC, EASON, ROBERT, WILLIAM, ROSS, GRAEME, WILLIAM, SMITH, PETER, GEORGE, ROBIN
Year of Publication 22.10.1998
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Year of Publication 22.10.1998
Patent