METHOD OF DEPOSITING CONDUCTORS IN HIGH ASPECT RATIO APERTURES USING A COLLIMATOR
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Year of Publication 04.09.1996
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CMP method
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Year of Publication 16.12.2010
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METHOD OF DEPOSITING CONDUCTORS IN HIGH ASPECT RATIO APERTURES
RYAN, JAMES G, MCDEVITT, THOMAS L, LEE, PEI P, PENNINGTON, SCOTT L, STRIPPE, DAVID C, PARRIES, PAUL C, LICATA, THOMAS J
Year of Publication 03.02.1998
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Year of Publication 03.02.1998
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Method of depositing conductors in high aspect ratio apertures using a collimator
MCDEVITT; THOMAS L, LICATA; THOMAS J, PENNINGTON; SCOTT L, PARRIES; PAUL C, STRIPPE; DAVID C, RYAN; JAMES G, LEE; PEI P
Year of Publication 28.03.1995
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Year of Publication 28.03.1995
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Method of depositing conductors in high aspect ratio apertures
RYAN, JAMES G, MCDEVITT, THOMAS L, LEE, PEI P, PENNINGTON, SCOTT L, STRIPPE, DAVID C, PARRIES, PAUL C, LICATA, THOMAS J
Year of Publication 21.10.1992
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Year of Publication 21.10.1992
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METHOD OF DEPOSITING CONDUCTORS IN HIGH ASPECT RATIO APERTURES
RYAN, JAMES G, MCDEVITT, THOMAS L, LEE, PEI P, PENNINGTON, SCOTT L, STRIPPE, DAVID C, PARRIES, PAUL C, LICATA, THOMAS J
Year of Publication 20.10.1992
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Year of Publication 20.10.1992
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METODO DE DEPOSICAO DE UMA CAMADA DE MATERIAL CONDUTOR,PROCESSOS DE METALIZACAO E DE FORMACAO DE UMA CAMADA DE BARREIRA E APARELHO UTILIZADO EM PROCESSO DE DEPOSICAO
PEI P. LEE, SCOTT L. PENNINGTON, JAMES G. RYAN, THOMAS L. MCDEVITT, PAUL C. PARRIES, DAVID C. STRIPPE, THOMAS J. LICATA
Year of Publication 01.12.1992
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Year of Publication 01.12.1992
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