Radio-frequency coil for use in an ionized physical vapor deposition apparatus
SIMON ANDREW HERBERT, SMETANA PAVEL, ROSSNAGEL STEPHEN MARK, RESTAINO DARRYL D
Year of Publication 29.05.2001
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Year of Publication 29.05.2001
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Wafer clamp ring for use in an ionized physical vapor deposition apparatus
SIMON ANDREW HERBERT, COONEY, III EDWARD C, SMETANA PAVEL, RESTAINO DARRYL D, ROSSNAGEL STEPHEN MARK
Year of Publication 23.01.2001
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Year of Publication 23.01.2001
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Apparatus and method for forming uniformly thick anodized films on large substrates
CARRUTHERS ROY ARTHUR, STEIN KENNETH JAY, KWIETNIAK KEITH T, COTTE JOHN MICHAEL, SIMON ANDREW HERBERT, GIGNAC LYNNE M, SUBBANNA SESHADRI, ANDRICACOS PANAYOTIS C, COHEN STEPHAN ALAN, SEEGER DAVID EARLE, WILDMAN HORATIO SEYMOUR
Year of Publication 22.04.2004
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Year of Publication 22.04.2004
Patent