Deposition of tetramethylsilane on the glass by plasma-enhanced chemical vapor deposition and atmospheric pressure plasma treatment
Chen, Ko-Shao, Liao, Shu-Chuan, Tsao, Shao-Hsuan, Inagaki, Norihiro, Wu, Hsin-Ming, Chou, Chin-Yen, Chen, Wei-Yu
Published in Surface & coatings technology (15.08.2013)
Published in Surface & coatings technology (15.08.2013)
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Journal Article
Conference Proceeding
The film deposition via atmospheric pressure plasma from ethanol and He mixing gases
CHEN, Ko-Shao, LIAO, Shu-Chuan, LIN, Shen-Wei, TSAO, Shao-Hsuan, TSAI HSIN TING, INAGAKI, Norihiro, WU, Hsin-Ming, CHEN, Wei-Yu
Published in Surface & coatings technology (01.09.2013)
Published in Surface & coatings technology (01.09.2013)
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Conference Proceeding
Journal Article