Integrating atomic layer deposition and ultra-high vacuum physical vapor deposition for in situ fabrication of tunnel junctions
Elliot, Alan J, Malek, Gary A, Lu, Rongtao, Han, Siyuan, Yu, Haifeng, Zhao, Shiping, Wu, Judy Z
Published in Review of scientific instruments (01.07.2014)
Published in Review of scientific instruments (01.07.2014)
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Journal Article
Probing the Nucleation of Al2O3 in Atomic Layer Deposition on Aluminum for Ultrathin Tunneling Barriers in Josephson Junctions
ELLIOT, Alan J, MALEK, Gary, WILLE, Logan, RONGTAO LU, SIYUAN HAN, WU, Judy Z, TALVACCHIO, John, LEWIS, Rupert M
Published in IEEE transactions on applied superconductivity (2013)
Published in IEEE transactions on applied superconductivity (2013)
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Conference Proceeding
Probing the Nucleation of Al2O3 in Atomic Layer Deposition on Aluminum for Ultrathin Tunneling Barriers in Josephson Junctions
Elliot, Alan J, Malek, Gary, Wille, Logan, Lu, Rongtao, Han, Siyuan, Wu, Judy Z, Talvacchio, John, Lewis, Rupert M
Published in arXiv.org (14.05.2014)
Published in arXiv.org (14.05.2014)
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Fabrication of Nb/Al2O3/Nb Josephson Junctions using in situ Magnetron Sputtering and Atomic Layer Deposition
Lu, Rongtao, Elliot, Alan J, Wille, Logan, Mao, Bo, Han, Siyuan, Wu, Judy Z, Talvacchio, John, Schulze, Heidi M, Lewis, Rupert M, Ewing, Daniel J, Yu, H F, Xue, G M, Zhao, S P
Published in arXiv.org (17.09.2013)
Published in arXiv.org (17.09.2013)
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