Search Results - "LIN YUN-YUE" :: K.UTB vyhledávací portál

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ROBUST HIGH TRANSMISSION PELLICLE FOR EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

by LIN YUN YUE
Year of Publication 14.03.2023

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ROBUST HIGH TRANSMISSION PELLICLE FOR EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

by LIN YUN YUE
Year of Publication 11.05.2021

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EUV LITHOGRAPHY SYSTEM AND METHOD FOR PATTERNING PHOTORESIST LAYER ON EUV MASK

by LIN YUN YUE, YEN ANTHONY, CHEN CHIA JEN, LEE HSIN CHANG
Year of Publication 06.04.2018

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Patent

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PELLICLE STRUCTURE AND METHOD FOR FORMING THE SAME

by LIN YUN YUE, YEN ANTHONY, CHEN CHIA JEN, LEE HSIN CHANG
Year of Publication 12.04.2017

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Patent

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PELLICLE ASSEMBLY AND METHOD FOR ADVANCED LITHOGRAPHY

by CHEN AMO, CHEN JENG HORNG, LIN YUN YUE, LIEN TA CHENG, LIN CHIH CHENG, LEE HSIN CHANG
Year of Publication 27.06.2017

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LITHOGRAPHY SYSTEM AND METHOD FOR PATTERNING PHOTORESIST LAYER ON EUV MASK

by LIN YUN YUE, YEN ANTHONY, CHEN CHIA JEN, LEE HSIN CHANG
Year of Publication 04.11.2015

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Patent

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PELLICLE STRUCTURE AND METHOD FOR FORMING THE SAME

by LIN YUN YUE, YEN ANTHONY, CHEN CHIA JEN, LEE HSIN CHANG
Year of Publication 03.11.2015

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Patent

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METHOD FOR FORMING STRUCTURE OF PELLICLE-MASK STRUCTURE WITH VENT STRUCTURE

by LIN, Yun-Yue
Year of Publication 22.08.2024

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Patent

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Pellicle for an EUV lithography mask and a method of manufacturing thereof

by Lin, Yun-Yue
Year of Publication 20.08.2024

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Patent

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Extreme ultraviolet lithography method using robust, high transmission pellicle

by Lin, Yun-Yue
Year of Publication 06.08.2024

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Patent

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EXTREME ULTRAVIOLET MASK AND METHOD FOR FORMING THE SAME

by LIN, Yun-Yue
Year of Publication 13.06.2024

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Patent

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Method for forming structure of pellicle-mask structure with vent structure

by Lin, Yun-Yue
Year of Publication 11.06.2024

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Patent

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EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF

by LIN, Yun-Yue
Year of Publication 25.04.2024

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EUV photo masks and manufacturing method thereof

by Lin, Yun-Yue
Year of Publication 30.01.2024

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Patent

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Extreme ultraviolet mask and method for forming the same

by Lin, Yun-Yue
Year of Publication 19.12.2023

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Patent

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PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF

by LIN, Yun-Yue
Year of Publication 30.11.2023

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PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF

by LIN, Yun-Yue
Year of Publication 16.11.2023

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Patent

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PELLICLE DESIGN FOR MASK APPLICATION

by Lin, Yun-Yue
Year of Publication 16.11.2023

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EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME

by LIN, Yun-Yue
Year of Publication 09.11.2023

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Extreme ultraviolet mask and method of manufacturing the same

by Lin, Yun-Yue
Year of Publication 17.10.2023

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Patent

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