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Year of Publication 21.06.2016
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Year of Publication 21.06.2016
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MEGASONIC WASHING METHOD AND WASHING APPARATUS
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Year of Publication 15.12.2011
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Year of Publication 15.12.2011
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METHOD OF MEGASONIC CLEANING OF AN OBJECT
OH JONG-KEUN, KIM WON-JUNG, KO HYUNG-HO, JEON CHAN-UK, KIM HO-YOUNG, CHOI JAE-HYUCK, PARK KEUN-HWAN
Year of Publication 10.01.2013
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Year of Publication 10.01.2013
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Method of megasonic cleaning of an object
OH JONG-KEUN, KIM WON-JUNG, KO HYUNG-HO, JEON CHAN-UK, KIM HO-YOUNG, CHOI JAE-HYUCK, PARK KEUN-HWAN
Year of Publication 23.10.2012
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Year of Publication 23.10.2012
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METHOD OF MEGASONIC CLEANING OF AN OBJECT
OH JONG-KEUN, KIM WON-JUNG, KO HYUNG-HO, JEON CHAN-UK, KIM HO-YOUNG, CHOI JAE-HYUCK, PARK KEUN-HWAN
Year of Publication 08.12.2011
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Year of Publication 08.12.2011
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Vorrichtung und Verfahren zur Entfernung eines Photoresists von einem Substrat
HAN, DONG-GYUN, CHOI, SANG-JUN, HONG, CHANG-KI, HAN, WOO-SUNG, LEE, HYO-SAN, KO, HYUNG-HO
Year of Publication 22.07.2010
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Year of Publication 22.07.2010
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MAINTENANCE METHOD OF MASK FOR SEMICONDUCTOR PROCESS
KO, HYUNG HO, KIM, SEONG YOON, LEE, DONG HUN, KIM, HYOUN WOO, WOO, SANG GYUN, NAM, DONG SEOK
Year of Publication 29.09.2009
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Year of Publication 29.09.2009
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Cleaning solution of silicon germanium layer and cleaning method using the same
MUN CHANG-SUP, CHOI SANG-JUN, KWON DOO-WON, KO HYUNG-HO, HONG CHANG-KI
Year of Publication 14.10.2008
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Year of Publication 14.10.2008
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