Maskless alignment scheme for BEOL memory array manufacturing
Seo, Soon-Cheon, Kong, Dexin, Sankarapandian, Muthumanickam, Patlolla, Raghuveer Reddy
Year of Publication 01.10.2024
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Year of Publication 01.10.2024
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Epitaxy Everywhere Based Self-Aligned Direct Backside Contact
Mochizuki, Shogo, Choi, Kisik, Xie, Ruilong, Sankarapandian, Muthumanickam
Year of Publication 28.03.2024
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Year of Publication 28.03.2024
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MULTILAYER WORK FUNCTION METAL IN NANOSHEET STACKS USING A SACRIFICIAL OXIDE MATERIAL
BAO, RUQIANG, Sankarapandian, Muthumanickam, Watanabe, Koji, Zhang, Jingyun
Year of Publication 15.06.2023
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Year of Publication 15.06.2023
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MULTILAYER WORK FUNCTION METAL IN NANOSHEET STACKS USING A SACRIFICIAL OXIDE MATERIAL
SANKARAPANDIAN, Muthumanickam, BAO, Ruqiang, WATANABE, Koji, ZHANG, Jingyun
Year of Publication 15.06.2023
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Year of Publication 15.06.2023
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MASKLESS ALIGNMENT SCHEME FOR BEOL MEMORY ARRAY MANUFACTURING
Seo, Soon-Cheon, Kong, Dexin, Sankarapandian, Muthumanickam, Patlolla, Raghuveer Reddy
Year of Publication 11.05.2023
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Year of Publication 11.05.2023
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Inner spacer formation for nanosheet transistors
Liu, Chi-Chun, Song, Yi, Chao, Robin Hsin Kuo, Sankarapandian, Muthumanickam
Year of Publication 23.07.2024
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Year of Publication 23.07.2024
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Metal via structure
Xu, Yongan, Chen, Hsueh-Chung, Vincent, Daniel J, Mignot, Yann, Sankarapandian, Muthumanickam, Kelly, James J
Year of Publication 10.10.2023
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Year of Publication 10.10.2023
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Contacts and liners having multi-segmented protective caps
Waskiewicz, Christopher J, Fullam, Jennifer, Sankarapandian, Muthumanickam, Fan, Su Chen
Year of Publication 09.11.2021
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Year of Publication 09.11.2021
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INNER SPACER FORMATION FOR NANOSHEET TRANSISTORS
Liu, Chi-Chun, Song, Yi, Chao, Robin Hsin Kuo, Sankarapandian, Muthumanickam
Year of Publication 13.04.2023
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Year of Publication 13.04.2023
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Nanosheet eDRAM
Fogel, Keith E, Reznicek, Alexander, Sankarapandian, Muthumanickam, Canaperi, Donald F
Year of Publication 02.03.2021
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Year of Publication 02.03.2021
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