Verfahren zur Erzeugung einer feinen Struktur in einem Halbleitersubstrat und Resistzusammensetzung hierfür
MOON, JOO-TAE, CHOI, SANG-JUN, KANG, YOOL, CHUNG, JEONG-HEE, WOO, SANG-GYUN
Year of Publication 27.12.2012
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Year of Publication 27.12.2012
Patent
Resist compositions including thermal crosslinking agents
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 03.02.2005
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Year of Publication 03.02.2005
Patent
Methods for forming line patterns in semiconductor substrates
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 12.10.2004
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Year of Publication 12.10.2004
Patent
Methods of forming metal-insulator-metal (MIM) capacitors with separate seed
OH SE-HOON, KIM SUNG-TAE, KIM KIUL, CHOI JEONG-SIK, CHOI JAE-HYOUNG, YOO CHA-YOUNG, CHUNG JEONG-HEE
Year of Publication 01.01.2008
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Year of Publication 01.01.2008
Patent
Methods for forming line patterns in semiconductor substrates
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 20.03.2003
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Year of Publication 20.03.2003
Patent
Methods for forming line patterns in semiconductor substrates
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 26.11.2002
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Year of Publication 26.11.2002
Patent
RESIST COMPOSITION AND FINE PATTERN FORMING METHOD USING SAME
MOON JU-TAE, KANG YOOL, SANG-JUN CHOI, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 26.12.2000
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Year of Publication 26.12.2000
Patent