Spacer integration methods and resulting devices
PETER BAARS, GEORGE ROBERT MULFINGER, HONTSCHEL JAN, HANS-JURGEN THEES, RYAN SPORER, RICK J. CARTER
Year of Publication 01.12.2017
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Year of Publication 01.12.2017
Patent
DIFFERENTIAL SG/EG SPACER INTEGRATION WITH EQUIVALENT NFET/PFET SPACER WIDTHS & DUAL RAISED SOURCE DRAIN EXPITAXIAL SILICON AND TRIPLE-NITRIDE SPACER INTEGRATION ENABLING HIGH-VOLTAGE EG DEVICE ON FDSOI
THEES, Hans-Jürgen, MULFINGER, George Robert, SPORER, Ryan, BAARS, Peter, CARTER, Rick J, HÖNTSCHEL, Jan
Year of Publication 12.03.2020
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Year of Publication 12.03.2020
Patent
Differential SG/EG spacer integration with equivalent NFET/PFET spacer widths and dial raised source drain expitaxial silicon and triple-nitride spacer integration enabling high-voltage EG device on FDSOI
Mulfinger, George Robert, Thees, Hans-Jürgen, Sporer, Ryan, Carter, Rick J, Baars, Peter, Höntschel, Jan
Year of Publication 31.12.2019
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Year of Publication 31.12.2019
Patent
DIFFERENTIAL SG/EG SPACER INTEGRATION WITH EQUIVALENT NFET/PFET SPACER WIDTHS & DUAL RAISED SOURCE DRAIN EXPITAXIAL SILICON AND TRIPLE-NITRIDE SPACER INTEGRATION ENABLING HIGH-VOLTAGE EG DEVICE ON FDSOI
MULFINGER George Robert, THEES Hans-Jürgen, HÖNTSCHEL Jan, CARTER Rick J, SPORER Ryan, BAARS Peter
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
Patent
DIFFERENTIAL SG/EG SPACER INTEGRATION WITH EQUIVALENT NFET/PFET SPACER WIDTHS & DUAL RAISED SOURCE DRAIN EXPITAXIAL SILICON AND TRIPLE-NITRIDE SPACER INTEGRATION ENABLING HIGH-VOLTAGE EG DEVICE ON FDSOI
MULFINGER George Robert, THEES Hans-Jürgen, HÖNTSCHEL Jan, CARTER Rick J, SPORER Ryan, BAARS Peter
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
Patent
Differential SG/EG spacer integration with equivalent NFET/PFET spacer widths and dual raised source drain expitaxial silicon and triple-nitride spacer integration enabling high-voltage EG device on FDSOI
Thees Hans-Jürgen, Carter Rick J, Höntschel Jan, Sporer Ryan, Mulfinger George Robert, Baars Peter
Year of Publication 31.10.2017
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Year of Publication 31.10.2017
Patent