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Year of Publication 12.07.2021
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Year of Publication 25.03.2021
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결정 성장 챔버에서 청크 폴리실리콘 또는 입상 폴리실리콘을 선택적으로 피딩하기 위한 시스템들
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Year of Publication 29.06.2018
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SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN CRYSTAL GROWTH CHAMBER
CHOI WON-JIN, YUN SEOK-MIN, LEE YOUNG-JUNG, JI JUN-HWAN, JUNG UISUNG, KOO TAE-SU, PARK SEONG-SU, KIM SUNG-JIN
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Year of Publication 03.08.2018
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