INSTANTANEOUS ELLIPSOMETER OR SCATTEROMETER AND ASSOCIATED MEASURING METHOD
PODZOROV ALEXANDER, VILLIER BRICE, NGUYEN THANH-LIEM, ACHER OLIVIER, GASTON JEAN-PAUL, MELIZZI GERALDINE
Year of Publication 15.01.2021
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Year of Publication 15.01.2021
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INSTANTANEOUS ELLIPSOMETER OR SCATTEROMETER AND ASSOCIATED MEASURING METHOD
NGUYEN, Thanh-Liem, GASTON, Jean-Paul, ACHER, Olivier, MELIZZI, Géraldine, PODZOROV, Alexander, VILLIER, Brice
Year of Publication 09.03.2022
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Year of Publication 09.03.2022
Patent
INSTANTANEOUS ELLIPSOMETER OR SCATTEROMETER AND ASSOCIATED MEASURING METHOD
NGUYEN, Thanh-Liem, GASTON, Jean-Paul, ACHER, Olivier, MELIZZI, Géraldine, PODZOROV, Alexander, VILLIER, Brice
Year of Publication 20.01.2021
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Year of Publication 20.01.2021
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INSTANTANEOUS ELLIPSOMETER OR SCATTEROMETER AND ASSOCIATED MEASURING METHOD
NGUYEN, Thanh-Liem, GASTON, Jean-Paul, ACHER, Olivier, MELIZZI, Géraldine, PODZOROV, Alexander, VILLIER, Brice
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
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