Extreme ultraviolet light source, radiation source and device thereof
ZHENG BOZHONG, YANG JI, ZHANG JUNKAI, LIU YUDE, JIANG YUSHENG, HUANG QINGJUN
Year of Publication 29.07.2022
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Year of Publication 29.07.2022
Patent
Extreme ultraviolet source, method for improving asymmetric deposition and radiation source
ZHENG BOZHONG, YANG JI, ZHANG JUNKAI, LIU YUDE, JIANG YUSHENG, HUANG QINGJUN
Year of Publication 01.07.2022
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Year of Publication 01.07.2022
Patent
Photoetching device and photoetching method
ZHENG BOZHONG, ZHANG JUNLIN, ZHANG HANLONG, LIU BAICUN, CHEN LIRUI, FU ZHONGQI
Year of Publication 03.03.2020
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Year of Publication 03.03.2020
Patent
Method for detecting cleanliness of photoetching equipment and reflective photomask
ZHENG BOZHONG, LI ZONGYAN, GUO JUEQI, ZHENG JIEREN, CHEN LIRUI, FU ZHONGQI
Year of Publication 21.02.2020
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Year of Publication 21.02.2020
Patent
Laser system and lithographic apparatus
YI WEITING, ZHENG BOZHONG, ZHANG JUNLIN, LIU BAICUN, CHEN ZHENGHONG, CHEN LIRUI, FU ZHONGQI
Year of Publication 21.02.2020
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Year of Publication 21.02.2020
Patent
Device and method for cleaning light collection mirror of photoetching device
ZHENG BOZHONG, CHEN JIAZHEN, LUO SHAOWEI, ZHONG RENYANG, WU SHANGYING, CHEN LIRUI, JIAN SHANGJIE
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
Patent
Spraying nozzle module, and photoetching apparatus and operation method thereof
ZHENG BOZHONG, LAI WEIZHI, LIU BAICUN, WU SHANGYING, CHEN LIRUI, JIAN SHANGJIE
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
Patent