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Method of forming a pattern on a substrate
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Year of Publication 30.11.2011
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Method of forming a pattern on a substrate
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Method of forming a pattern on a substrate
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Year of Publication 06.04.2011
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Method to vary dimensions of a substrate during nano-scale manufacturing
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Year of Publication 05.01.2011
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Method of forming a pattern on a substrate
BAILLEY, TODD, WILLSON, C., GRANT, ECKERDT, JOHN, CHOI, BYUNG, JIN, COLBURN, MATTHEW, SREENIVASAN, S., V
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Year of Publication 05.01.2011
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Method to vary dimensions of a substrate during nano-scale manufacturing
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Year of Publication 29.12.2010
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