Consecutive C-C Bond Scission of an Allyl Ligand on a WOs3 Cluster Framework
Park, Joon T, Woo, Byung Won, Chung, Jeong-Hee, Shim, Sang Chul, Lee, Jin-Ho, Lim, Sung-Su, Suh, Il-Hwan
Published in Organometallics (01.09.1994)
Published in Organometallics (01.09.1994)
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Journal Article
Verfahren zur Erzeugung einer feinen Struktur in einem Halbleitersubstrat und Resistzusammensetzung hierfür
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Year of Publication 27.12.2012
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Year of Publication 27.12.2012
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Resist compositions including thermal crosslinking agents
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 03.02.2005
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Year of Publication 03.02.2005
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Methods for forming line patterns in semiconductor substrates
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 12.10.2004
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Year of Publication 12.10.2004
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Methods for forming line patterns in semiconductor substrates
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 20.03.2003
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Year of Publication 20.03.2003
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Methods for forming line patterns in semiconductor substrates
MOON JOO-TAE, CHOI SANG-JUN, KANG YOOL, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 26.11.2002
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Year of Publication 26.11.2002
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RESIST COMPOSITION AND FINE PATTERN FORMING METHOD USING SAME
MOON JU-TAE, KANG YOOL, SANG-JUN CHOI, CHUNG JEONG-HEE, WOO SANG-GYUN
Year of Publication 26.12.2000
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Year of Publication 26.12.2000
Patent
Production of fine structure in semiconductor substrates involves coating a target layer with a resist containing a crosslinker, forming a photoresist by lithography and then heating to crosslink and form narrower holes
MOON, JOO-TAE, CHOI, SANG-JUN, KANG, YOOL, CHUNG, JEONG-HEE, WOO, SANG-GYUN
Year of Publication 26.10.2000
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Year of Publication 26.10.2000
Patent