Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 03.05.2005
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Year of Publication 03.05.2005
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Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 05.12.2002
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Year of Publication 05.12.2002
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APPARATUS AND METHOD FOR FORMING AN OXYNITRIDE INSULATING LAYER ON A SEMICONDUCTOR WAFER
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 12.09.2002
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Year of Publication 12.09.2002
Patent
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 20.08.2002
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Year of Publication 20.08.2002
Patent
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
HEENAN CAROL J, BUCHANAN DOUGLAS A, VAREKAMP PATRICK R, HODGE WADE J, GOUSEV EVGENI P, SHANK STEVEN M
Year of Publication 12.02.2002
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Year of Publication 12.02.2002
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