METHOD FOR MANUFACTURING A MEMS DEVICE BY FIRST HYBRID BONDING A CMOS WAFER TO A MEMS WAFER
Lin, Hung-Hua, Peng, Jung-Huei, Liu, Ping-Yin, Wu, Chang-Ming, Yu, Chung-Yi
Year of Publication 30.06.2022
Get full text
Year of Publication 30.06.2022
Patent
Method for manufacturing a MEMS device by first hybrid bonding a CMOS wafer to a MEMS wafer
Lin, Hung-Hua, Peng, Jung-Huei, Liu, Ping-Yin, Wu, Chang-Ming, Yu, Chung-Yi
Year of Publication 22.03.2022
Get full text
Year of Publication 22.03.2022
Patent
MEMS devices including MEMS dies and connectors thereto
Peng, Jung-Huei, Tsai, Hung-Chia, Teng, Yi-Chuan, Cheng, Chun-Wen, Tsai, Shang-Ying
Year of Publication 14.09.2021
Get full text
Year of Publication 14.09.2021
Patent
Fluid deposition apparatus and method
Peng, Jung-Huei, Liu, Yi-Shao, Lai, Fei-Lung, Cheng, Chun-Wen, Tsai, Shang-Ying
Year of Publication 08.06.2021
Get full text
Year of Publication 08.06.2021
Patent
MEMS devices with an element having varying widths
Lin, Hung-Hua, Peng, Jung-Huei, Huang, Yao-Te, Pan, Lung Yuan, Tsai, Shang-Ying, Huang, Hsin-Ting
Year of Publication 28.09.2021
Get full text
Year of Publication 28.09.2021
Patent
MEMS devices including MEMS dies and connectors thereto
Peng, Jung-Huei, Tsai, Hung-Chia, Teng, Yi-Chuan, Cheng, Chun-Wen, Tsai, Shang-Ying
Year of Publication 14.07.2020
Get full text
Year of Publication 14.07.2020
Patent
MEMS devices including MEMS dies and connectors thereto
Peng, Jung-Huei, Tsai, Hung-Chia, Teng, Yi-Chuan, Cheng, Chun-Wen, Tsai, Shang-Ying
Year of Publication 17.12.2019
Get full text
Year of Publication 17.12.2019
Patent
METHOD FOR MANUFACTURING A MEMS DEVICE BY FIRST HYBRID BONDING A CMOS WAFER TO A MEMS WAFER
Lin, Hung-Hua, Peng, Jung-Huei, Liu, Ping-Yin, Wu, Chang-Ming, Yu, Chung-Yi
Year of Publication 08.08.2019
Get full text
Year of Publication 08.08.2019
Patent
Method for manufacturing a MEMS device by first hybrid bonding a CMOS wafer to a MEMS wafer
Lin, Hung-Hua, Peng, Jung-Huei, Liu, Ping-Yin, Wu, Chang-Ming, Yu, Chung-Yi
Year of Publication 21.05.2019
Get full text
Year of Publication 21.05.2019
Patent