Substrate carrier used to holding thin layer substrates during the manufacture of high pressure sensor elements comprises a base element for receiving the substrate arranged on a handling element having covering elements
KRETSCHMANN, ANDRE, SCHARPING, ARMIN, WANKA, HARALD, GOEBEL, HERBERT, WINGSCH, VOLKER, WEIBLEN, KURT, HENN, RALF, GLUECK, JOACHIM
Year of Publication 25.01.2001
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Year of Publication 25.01.2001
Patent
SUBSTRATE AND WORKPIECE SUPPORT FOR RECEIVING A SUBSTRATE
KRETSCHMANN, ANDRE, SCHARPING, ARMIN, WANKA, HARALD, GOEBEL, HERBERT, WINGSCH, VOLKER, WEIBLEN, KURT, HENN, RALF, GLUECK, JOACHIM
Year of Publication 08.05.2002
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Year of Publication 08.05.2002
Patent
SUBSTRATE AND WORKPIECE SUPPORT FOR RECEIVING A SUBSTRATE
KRETSCHMANN, ANDRE, SCHARPING, ARMIN, WANKA, HARALD, GOEBEL, HERBERT, WINGSCH, VOLKER, WEIBLEN, KURT, HENN, RALF, GLUECK, JOACHIM
Year of Publication 01.02.2001
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Year of Publication 01.02.2001
Patent