Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution
KIM MI-YOUNG, HWANG JEONG-WOOK, KIM TAI-HYOUNG, SON HONG-SEONG, HAN SANGOL
Year of Publication 29.04.2008
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Year of Publication 29.04.2008
Patent
Methods of fabricating a semiconductor device using an organic compound and fluoride-based buffered solution
KIM MI-YOUNG, HWANG JEONG-WOOK, KIM TAI-HYOUNG, SON HONG-SEONG, HAN SANGOL
Year of Publication 24.11.2005
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Year of Publication 24.11.2005
Patent