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METHOD AND APPARATUS FOR THE CHEMICAL VAPOUR DEPOSITION OF III-V SEMICONDUCTORS UTILIZING ORGANOMETALLIC AND ELEMENTAL PNICTIDE SOURCES
by
KUCK, MARK A
,
GERSTEN
,
SUSAN W
,
BAUMANN, JOHN A
Year of Publication
30.11.1988
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METHOD AND APPARATUS FOR THE CHEMICAL VAPOR DEPOSITION OF III-V SEMICONDUCTORS UTILIZING ORGANOMETALLIC AND ELEMENTAL PNICTIDE SOURCES
by
MARK A. KUCK
,
SUSAN W
.
GERSTEN
,
JOHN A. BAUMANN
Year of Publication
24.06.1987
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METHOD AND APPARATUS FOR THE CHEMICAL VAPOR DEPOSITION OF III-V SEMICONDUCTORS UTILIZING ORGANOMETALLIC AND ELEMENTAL PNICTIDE SOURCES
by
MARK A. KUCK
,
SUSAN W
.
GERSTEN
,
JOHN A. BAUMANN
Year of Publication
05.03.1987
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Method and apparatus for the chemical vapour deposition of III-V semiconductors utilizing organometallic and elemental pnictide sources
by
KUCK, MARK A
,
GERSTEN
,
SUSAN W
,
BAUMANN, JOHN A
Year of Publication
04.03.1987
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METHOD AND APPARATUS FOR THE CHEMICAL VAPOR DEPOSITION OF III-V SEMICONDUCTORS UTILIZING ORGANOMETALLIC AND ELEMENTAL PNICTIDE SOURCES
by
GERSTEN
,
SUSAN
,
W
,
BAUMANN, JOHN, A
,
KUCK, MARK, A
Year of Publication
12.02.1987
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after-treatment of single crystals or a homogeneouspolycrystalline material with defined structure
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basic electric elements
chemical surface treatment
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