Methods of processing substrates and methods of protecting process chambers
CLEMONS, MAXIMILLIAN, LIANG, QIWEI, MALIK, SULTAN, KHAN, ADIB, NEMANI, SRINIVAS D
Year of Publication 11.11.2023
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Year of Publication 11.11.2023
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Damage-free conductor formation
CLEMONS, MAXIMILLIAN, REN, HE, YU, MINRUI, YING, CHENTSAU, NAIK, MEHUL, KIM, JONG MUN
Year of Publication 11.02.2022
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Year of Publication 11.02.2022
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Damage-free conductor formation
CLEMONS, MAXIMILLIAN, REN, HE, KIM, JONG-MUN, YU, MIN-RUI, YING, CHENTSAU, NAIK, MEHUL
Year of Publication 16.02.2021
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Year of Publication 16.02.2021
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IN-SITU CVD AND ALD COATING OF CHAMBER TO CONTROL METAL CONTAMINATION
MALIK SULTAN, NEMANI SRINIVAS D, KHAN ADIB, CLEMONS MAXIMILLIAN, LIANG QIWEI
Year of Publication 29.12.2020
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Year of Publication 29.12.2020
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In-situ CVD and ALD coating of chamber to control metal contamination
CLEMONS, MAXIMILLIAN, LIANG, QIWEI, MALIK, SULTAN, KHAN, ADIB, NEMANI, SRINIVAS D
Year of Publication 16.01.2020
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Year of Publication 16.01.2020
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Methods of forming metal silicide layers and metal silicide layers formed therefrom
CLEMONS, MAXIMILLIAN, SHEK, MEI-YEE, REN, HE, YU, MINRUI, YING, CHENTSAU, MEBARKI, BENCHERKI, NEMANI, SRINIVAS D, NAIK, MEHUL B
Year of Publication 21.09.2020
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Year of Publication 21.09.2020
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Methods of forming metal silicide layers and metal silicide layers formed therefrom
CLEMONS, MAXIMILLIAN, SHEK, MEI-YEE, REN, HE, YU, MIN-RUI, YING, CHENTSAU, MEBARKI, BENCHERKI, NEMANI, SRINIVAS D, NAIK, MEHUL B
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
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METHODS OF FORMING METAL SILICIDE LAYERS AND METAL SILICIDE LAYERS FORMED THEREFROM
NEMANI SRINIVAS D, NAIK MEHUL B, YU MINRUI, CLEMONS MAXIMILIAN, REN HE, SHEK MEI-YEE, YING CHENTSAU, MEBARKI BENCHERKI
Year of Publication 18.10.2019
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Year of Publication 18.10.2019
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