Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
MAYER STEVEN T, DREWERY JOHN S, BROADBENT ELIOT K, CONTOLINI ROBERT J
Year of Publication 23.03.2004
Get full text
Year of Publication 23.03.2004
Patent
Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
MAYER STEVEN T, DREWERY JOHN S, BROADBENT ELIOT K, CONTOLINI ROBERT J
Year of Publication 20.06.2002
Get full text
Year of Publication 20.06.2002
Patent
Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil
TOBIN JEFFREY A, ROUGH J. KIRKWOOD H, BROADBENT ELIOT K, BENZING JEFFREY C
Year of Publication 01.05.2001
Get full text
Year of Publication 01.05.2001
Patent