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Year of Publication 21.06.2016
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Dual hard mask lithography process
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Year of Publication 28.01.2015
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Dual hard mask lithography process
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Year of Publication 23.12.2014
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Year of Publication 23.12.2014
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Dual hard mask lithography process
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Year of Publication 03.09.2014
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Method for producing self-aligned mask, articles produced by same and composition for same
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Year of Publication 21.02.2012
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Lithographieprozess und Lithographische Struktur mit doppelter Hartmaske
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Year of Publication 29.08.2019
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DUAL HARD MASK LITHOGRAPHY PROCESS
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Year of Publication 29.08.2013
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Year of Publication 29.08.2013
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DUAL HARD MASK LITHOGRAPHY PROCESS
YIN YUNPENG, BURNS SEAN D, SANKARAPANDIAN MUTHUMANICKAM, HOLMES STEVEN J, HORAK DAVID V, ARNOLD JOHN C
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Year of Publication 22.08.2013
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TITANIUM NITRIDE REMOVAL
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Year of Publication 08.08.2013
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Selectively coated self-aligned mask
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
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Year of Publication 23.07.2013
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METHOD FOR PRODUCING SELF-ALIGNED MASK, ARTICLES PRODUCED BY SAME AND COMPOSITION FOR SAME
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Year of Publication 11.09.2008
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Method for producing self-aligned mask, articles produced by same and composition for same
SANKARAPANDIAN MUTHUMANICKAM, BRUNNER TIMOTHY A, HUANG ELBERT, COLBURN MATTHEW E
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Year of Publication 27.05.2008
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Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
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Year of Publication 24.05.2011
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Method for producing self-aligned mask, articles produced by same and composition for same
SANKARAPANDIAN MUTHUMANICKAM, BRUNNER TIMOTHY A, HUANG ELBERT, COLBURN MATTHEW E
Year of Publication 03.03.2005
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Year of Publication 03.03.2005
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Lithographieprozess mit doppelter Hartmaske
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Year of Publication 13.11.2014
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Year of Publication 13.11.2014
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DUAL HARD MASK LITHOGRAPHY PROCESS
YIN YUNPENG, BURNS SEAN D, SANKARAPANDIAN MUTHUMANICKAM, HOLMES STEVEN J, HORAK DAVID V, ARNOLD JOHN C
Year of Publication 05.11.2014
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Year of Publication 05.11.2014
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Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
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Year of Publication 03.02.2009
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Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
Year of Publication 30.10.2008
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Year of Publication 30.10.2008
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Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
Year of Publication 30.10.2008
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Year of Publication 30.10.2008
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Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
Year of Publication 20.10.2005
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Year of Publication 20.10.2005
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