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METHODS AND COMPOSITIONS FOR IMPROVED PATTERNING OF PHOTORESIST

METHODS AND COMPOSITIONS FOR IMPROVED PATTERNING OF PHOTORESIST

by CHANG CHING YU, CHEN YA LUN
Year of Publication 18.05.2023

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Patent

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

by LAI WEI HAN, CHANG CHING YU, HSIEH CHIEH HSIN
Year of Publication 07.03.2024

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Patent

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

by LIN CHIN HSIANG, ZI AN REN, CHANG CHING YU
Year of Publication 24.10.2023

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Patent

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

by CHANG CHING YU, YANG LI PO
Year of Publication 01.12.2021

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Patent

PROTECTIVE COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

PROTECTIVE COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

by LIN CHIN HSIANG, ZI AN REN, CHANG CHING YU
Year of Publication 30.01.2023

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Patent

BOTTOM ANTIREFLECTIVE COATING MATERIALS

BOTTOM ANTIREFLECTIVE COATING MATERIALS

by CHANG CHING YU, CHEN CHIEN CHIH
Year of Publication 18.02.2021

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Patent

PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST

PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST

by WENG MING HUI, ZI AN REN, LIU CHEN YU, CHANG CHING YU
Year of Publication 05.03.2024

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Patent

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

by LAI WEI HAN, CHANG CHING YU, YANG LI PO
Year of Publication 28.12.2021

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Patent

EUV EUV METALLIC RESIST PERFORMANCE ENHANCEMENT VIA ADDITIVES

EUV EUV METALLIC RESIST PERFORMANCE ENHANCEMENT VIA ADDITIVES

by ZI AN REN, CHANG CHING YU, CHENG JOY
Year of Publication 26.12.2019

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Patent

PHOTOSENSITIVE MATERIAL AND METHOD OF LITHOGRAPHY

PHOTOSENSITIVE MATERIAL AND METHOD OF LITHOGRAPHY

by CHANG CHING YU
Year of Publication 27.04.2016

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Patent

METHOD OF FORMING PHOTORESIST PATTERN

METHOD OF FORMING PHOTORESIST PATTERN

by CHANG CHING YU, KO TSUNG HAN, SU YU CHUNG
Year of Publication 09.07.2021

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Patent

EUV NEGATIVE TONE PHOTORESIST FOR EUV LITHOGRAPHY

EUV NEGATIVE TONE PHOTORESIST FOR EUV LITHOGRAPHY

by LAI WEI HAN, CHANG CHING YU, YANG LI PO
Year of Publication 11.05.2021

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Patent

METHOD FOR FORMING PATTERNED PHOTORESIST

METHOD FOR FORMING PATTERNED PHOTORESIST

by LIN CHIN HSIANG, CHANG CHING YU, HO CHUN CHIH
Year of Publication 11.03.2021

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Patent

EUV EUV PHOTORESIST WITH LOW-ACTIVATION-ENERGY LIGANDS OR HIGH-DEVELOPER-SOLUBILITY LIGANDS

EUV EUV PHOTORESIST WITH LOW-ACTIVATION-ENERGY LIGANDS OR HIGH-DEVELOPER-SOLUBILITY LIGANDS

by ZI AN REN, LIU CHEN YU, CHANG CHING YU
Year of Publication 11.03.2021

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Patent

METHOD AND APPARATUS OF PATTERNING A SEMICONDUCTOR DEVICE

METHOD AND APPARATUS OF PATTERNING A SEMICONDUCTOR DEVICE

by ZI AN REN, CHANG CHING YU
Year of Publication 08.02.2017

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Patent

EUV HUMIDITY CONTROL IN EUV LITHOGRAPHY

EUV HUMIDITY CONTROL IN EUV LITHOGRAPHY

by LIN CHIN HSIANG, ZI AN REN, CHANG CHING YU, CHENG JOY
Year of Publication 04.08.2020

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Patent

PROTECTIVE COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

PROTECTIVE COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

by LIN CHIN HSIANG, ZI AN REN, CHANG CHING YU
Year of Publication 15.06.2020

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Patent

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

PHOTORESIST COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN

by LIN CHIN HSIANG, CHANG CHING YU, HO CHUN CHIH
Year of Publication 20.04.2020

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Patent

NEW DEVELOPER FOR LITHOGRAPHY

NEW DEVELOPER FOR LITHOGRAPHY

by LIU CHEN YU, CHANG CHING YU
Year of Publication 31.05.2018

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Patent

EUV MANUFACTURING METHOD OF EUV PHOTO MASKS

EUV MANUFACTURING METHOD OF EUV PHOTO MASKS

by CHU CHIA CHING, CHENG YAHRU, LIEN TA CHENG, CHANG CHING YU, HSIEH WEI CHE, CHEN YA LUN, SU YU CHUNG, WANG TZU YI, LEE HSIN CHANG
Year of Publication 31.05.2023

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Patent