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Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma
by
HAM, Yong-Hyun
,
ALEXANDROVICH SHUTOV, Dmitriy
,
BAEK, Kyu-Ha
,
DO
,
Lee
-
Mi
,
KIM, Kwangsoo
,
LEE, Chi-Woo
,
KWON, Kwang-Ho
Published in
Thin solid films
(2010)
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